ʻO ka humidity kahi kūlana hoʻomalu kaiapuni maʻamau i ka hana o nā lumi maʻemaʻe. Hoʻoponopono ʻia ka waiwai o ka haʻahaʻa pili i loko o ka lumi maʻemaʻe semiconductor ma waena o 30 a 50%, e ʻae ana i ka hewa i loko o kahi ākea haiki o ± 1%, e like me kahi kiʻi kiʻi kiʻi - a i ʻole ka liʻiliʻi i ka ʻāpana hana ultraviolet mamao (DUV). - Ma nā wahi ʻē aʻe, hiki iā ʻoe ke hoʻomaha i loko o ± 5%.
No ka mea he nui nā kumu i hiki ke kōkua i ka hana holoʻokoʻa o ka lumi maʻemaʻe, e like me:
● ulu ka bacteria;
● ʻO ka laulā o ka hōʻoluʻolu i manaʻoʻia e ke koʻokoʻo i ka mahana wela;
● Hōʻike ʻia ka hoʻouka paʻa;
● metala corrosion;
● Hoʻohuehu wai;
● degradation o ka lithography;
● Hoʻomoʻa wai.
Hiki ke hoʻonui nui ʻia ka maʻi bacteria a me nā mea ʻino ʻē aʻe (mold, virus, fungi, mites) i nā wahi me ka haʻahaʻa haʻahaʻa ma luna o 60%. Hiki ke ulu kekahi mau pua i ka wā i ʻoi aku ka haʻahaʻa haʻahaʻa ma mua o 30%. Aia ka haʻahaʻa haʻahaʻa ma waena o 40% a me 60%, hiki ke hōʻemi ʻia nā hopena o ka bacteria a me nā maʻi hanu.
ʻO ka haʻahaʻa haʻahaʻa ma waena o 40% a 60% he ʻano haʻahaʻa hoʻi kahi e ʻoluʻolu ai ke kanaka. Hiki i ka ha'aha'a ha'aha'a ke kaumaha i ka po'e, a'o ka ha'aha'a ma lalo o 30% hiki i ka po'e ke ho'omalo'o, ka po'e, ka 'eha hanu a me ka 'eha'eha o ka na'au.
ʻO ka haʻahaʻa kiʻekiʻe e hōʻemi maoli i ka hōʻiliʻili ʻana o ka static charge ma ka ʻili o ka lumi maʻemaʻe - ʻo ia ka hopena i makemake ʻia. ʻOi aku ka maikaʻi o ka haʻahaʻa haʻahaʻa no ka hōʻiliʻili kālā a me kahi kumu hoʻopōʻino o ka hoʻokuʻu electrostatic. Ke ʻoi aku ka haʻahaʻa haʻahaʻa ma mua o 50%, hoʻomaka ka haʻahaʻa static e hemo wikiwiki, akā inā ʻoi aku ka haʻahaʻa haʻahaʻa ma mua o 30%, hiki iā lākou ke hoʻomau no ka manawa lōʻihi ma luna o ka insulator a i ʻole ka papa honua.
ʻO ka haʻahaʻa haʻahaʻa ma waena o 35% a me 40% hiki ke lilo i mea ʻoluʻolu, a hoʻohana maʻamau nā lumi semiconductor i nā mana hou e kaupalena i ka hōʻiliʻili ʻana o ka uku static.
E piʻi aʻe ka wikiwiki o nā hopena kemika he nui, me ke kaʻina hana corrosion, i ka piʻi ʻana o ka haʻahaʻa pili. ʻO nā ʻili a pau i ʻike ʻia i ka ea a puni ka lumi maʻemaʻe e uhi koke ʻia me hoʻokahi monolayer wai. Ke hoʻokumu ʻia kēia mau ʻili i kahi uhi metala lahilahi e hiki ke hana me ka wai, hiki i ka haʻahaʻa kiʻekiʻe ke hoʻolalelale i ka hopena. ʻO ka mea pōmaikaʻi, hiki i kekahi mau metala, e like me ka aluminika, ke hana i kahi ʻokikene pale me ka wai a pale i nā hopena oxidation hou; akā ʻo kekahi hihia, e like me ka copper oxide, ʻaʻole ia he pale, no laila, ma nā wahi haʻahaʻa kiʻekiʻe, ʻoi aku ka maʻalahi o nā ʻili keleawe i ka corrosion.
Eia kekahi, i loko o kahi kiʻekiʻe e pili ana i ka haʻahaʻa haʻahaʻa, hoʻonui ʻia ka photoresist a hoʻonui ʻia ma hope o ka pōʻai bakena ma muli o ka absorption o ka wai. Hiki ke hoʻopili maikaʻi ʻia ka pili ʻana o Photoresist e ka haʻahaʻa pili kiʻekiʻe; ʻO ka haʻahaʻa haʻahaʻa haʻahaʻa (ma kahi o 30%) e maʻalahi ka hoʻopili ʻana i ka photoresist, ʻoiai me ka ʻole o ka pono o kahi hoʻololi polymeric.
ʻO ka hoʻomalu ʻana i ka haʻahaʻa haʻahaʻa i loko o kahi lumi maʻemaʻe semiconductor ʻaʻole ia he mea ʻole. Eia naʻe, i ka loli ʻana o ka manawa, ʻoi aku ka maikaʻi o ka nānā ʻana i nā kumu a me nā kumu o nā hana maʻamau i ʻae ʻia.
ʻAʻole hiki ke ʻike nui ʻia ka haʻahaʻa no kā mākou hōʻoluʻolu kanaka, akā pinepine ka hopena nui i ka hana hana, ʻoi aku ka nui o ka humidity, a ʻo ka humidity ka mea ʻoi loa ka mana, ʻo ia ke kumu.
Ka manawa hoʻouna: Sep-01-2020